Revision as of 20:22, 21 September 2011

Introduction
Our Project
Tools
- Gibson Assembly
- MITOMI
Notebook
- Protocols
- May
- June
- July
- August
- September
- October
Considerations
- Human Practices
- Safety
Acknowledgements
- Sponsors
- Partners

Master fabrication for PDMS replica moulding

Back to protocols.

The protocol below is for a two lithographic steps process, for the case when two different channel heights are needed. If one height is needed, as in the case of MITOMI chips fabrication, only one resist configured during one lithographic process is necessary. Cross section images of the wafer during the main technological steps

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	The protocol below is for a two lithographic steps process, for the case when two different channel heights are needed.		The protocol below is for a two lithographic steps process, for the case when two different channel heights are needed.

Team:EPF-Lausanne/Protocols/Master microfabrication for PDMS replica molding

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Revision as of 20:22, 21 September 2011

Master fabrication for PDMS replica moulding